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| # | Part: | Description: | Manuf. | Package | Pins | T°min | T°max | PDF size |
| 1. | ATmega103-6AC | 8-bit microcontroller with 128K bytes in-system programmable flash, 4.0-5.5V power supply | ATMEL | plastic TQFP | 64 | 0°C | 70°C | 280K |
| 2. | ATmega103-6AI | 8-bit microcontroller with 128K bytes in-system programmable flash, 4.0-5.5V power supply | ATMEL | plastic TQFP | 64 | -40°C | 85°C | 280K |
| 3. | ATmega103L-4AC | 8-bit microcontroller with 128K bytes in-system programmable flash, 2.7-3.6V power supply | ATMEL | plastic TQFP | 64 | 0°C | 70°C | 280K |
| 4. | ATmega103L-4AI | 8-bit microcontroller with 128K bytes in-system programmable flash, 2.7-3.6V power supply | ATMEL | plastic TQFP | 64 | -40°C | 85°C | 280K |
| 5. | ATmega128-16AC | Microcontroller with 128K bytes In-system programmable flash, 16 MHz, power supply =4.5 - 5.5V | ATMEL | TQFP | 64 | 0°C | 70°C | 360K |
| 6. | ATmega128-16AI | Microcontroller with 128K bytes In-system programmable flash, 16 MHz, power supply =4.5 - 5.5V | ATMEL | TQFP | 64 | -40°C | 85°C | 360K |
| 7. | ATmega128-8AC | Microcontroller with 128K bytes In-system programmable flash, 8 MHz, power supply =2.7 - 5.5V | ATMEL | TQFP | 64 | 0°C | 70°C | 360K |
| 8. | ATmega161-4AC | Microcontroller with 16K bytes in-system programmable flash, power supply 2.7 - 5.5V, 4 MHz | ATMEL | TQFP | 44 | 0°C | 70°C | 2M |
| 9. | ATmega163-8AC | Microcontroller with 16K bytes in-system programmable flash, 8MHz | ATMEL | TQFP | 44 | 0°C | 70°C | 2M |
| 10. | ATmega163-8AI | Microcontroller with 16K bytes in-system programmable flash, 8MHz | ATMEL | TQFP | 44 | -40°C | 85°C | 2M |
| 11. | ATmega163-8PC | Microcontroller with 16K bytes in-system programmable flash, 8MHz | ATMEL | PDIP | 40 | 0°C | 70°C | 2M |
| 12. | ATmega163-8PI | Microcontroller with 16K bytes in-system programmable flash, 8MHz | ATMEL | PDIP | 40 | -40°C | 85°C | 2M |
| 13. | ATmega163L-4AC | Microcontroller with 16K bytes in-system programmable flash, 4MHz | ATMEL | TQFP | 44 | 0°C | 70°C | 2M |
| 14. | ATmega163L-4AI | Microcontroller with 16K bytes in-system programmable flash, 4MHz | ATMEL | TQFP | 44 | -40°C | 85°C | 2M |
| 15. | ATmega163L-4PC | Microcontroller with 16K bytes in-system programmable flash, 4MHz | ATMEL | PDIP | 40 | 0°C | 70°C | 2M |
| 16. | ATmega163L-4PI | Microcontroller with 16K bytes in-system programmable flash, 4MHz | ATMEL | PDIP | 40 | -40°C | 85°C | 2M |
| 17. | ATmega603-6AC | 8-bit microcontroller with 64K bytes in-system programmable flash, 4.0-5.5V power supply | ATMEL | plastic TQFP | 64 | 0°C | 70°C | 280K |
| 18. | ATmega603-6AI | 8-bit microcontroller with 64K bytes in-system programmable flash, 4.0-5.5V power supply | ATMEL | plastic TQFP | 64 | -40°C | 85°C | 280K |
| 19. | ATmega603L-4AC | 8-bit microcontroller with 64K bytes in-system programmable flash, 2.7-3.6V power supply | ATMEL | plastic TQFP | 64 | 0°C | 70°C | 280K |
| 20. | ATmega603L-4AI | 8-bit microcontroller with 64K bytes in-system programmable flash, 2.7-3.6V power supply | ATMEL | plastic TQFP | 64 | -40°C | 85°C | 280K |
